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Practical MEMS: Design of microsystems, accelerometers, gyroscopes, RF MEMS, optical MEMS, and microfluidic systems, by Ville Kaajakari
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Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include:
Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design.
Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks.
Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered.
Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications.
MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.
- Sales Rank: #388977 in Books
- Brand: Brand: Small Gear Publishing
- Published on: 2009-03-17
- Original language: English
- Number of items: 1
- Dimensions: 10.00" h x 1.06" w x 7.01" l, 2.54 pounds
- Binding: Hardcover
- 496 pages
- Used Book in Good Condition
Most helpful customer reviews
0 of 0 people found the following review helpful.
Good as an introduction for chip designers
By Stephen
This book covers various kinds of MEMS used in the industry. Good as an introduction for chip designers.
1 of 1 people found the following review helpful.
A good intro to MEMS devices, design, etc....
By J. Sweeney
This book gives an excellent outline of the design process, fabrication, and cost analysis of developing a MEMS device. Highly recommended for courses focusing on MEMS development or as a reference for those experienced in the field.
4 of 4 people found the following review helpful.
Invaluable source of MEMS information
By Antti Jaakkola
As a MEMS professional I find this book an invaluable complement to the selection of MEMS textbooks - I wish this book had existed already when I started my career in the field. The book is well written, and the practical examples facilitate understanding of the subject. For me, especially the chapters on readout electronics have helped me become a better MEMS designer. I highly recommend investing in this book.
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